Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange: Difference between revisions
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This modification is described by SPTS [[:File:SPTS High Flow Plenum Upgrade for Pegasus Nov 2012.pdf]]. | This modification is described by SPTS [[:File:SPTS High Flow Plenum Upgrade for Pegasus Nov 2012.pdf]]. | ||
The modification was also done on Pegasus 2 before we started using it. | |||
== Comparison of continuous processes == | == Comparison of continuous processes == | ||