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| Line 642: |
Line 642: |
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| |} | | |} |
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| == Process A variations May-June 2016 ==
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| Process A may overpassivate producing grass. To investigate the results
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| {| border="1" cellpadding="1" cellspacing="1" style="text-align:center;"
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| |-
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| ! rowspan="2" width="20"| Recipe
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| ! rowspan="2" width="20"| Temp.
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| ! colspan="4" | Deposition step
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| ! colspan="6" | Etch step
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| ! colspan="2" | Comments
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| |-
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| ! Time
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| ! Pres.
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| ! C<sub>4</sub>F<sub>8</sub>
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| ! Coil
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| ! Time
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| ! Pressure
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| ! SF<sub>6</sub>
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| ! O<sub>2</sub>
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| ! Coil
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| ! Platen
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| ! SEM images
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| ! width="100" | Key words
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| |-
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| ! PrA-0 <!-- step -->
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| | 20 <!-- chiller temp -->
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| | 4 <!-- dep time -->
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| | 25 <!-- dep pressure -->
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| | 200 <!-- C4F8 flow -->
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| | 2000 <!-- coil power -->
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| | 7.0 <!-- etch time -->
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| | 25(1.5s) 150 <!-- etch pressure -->
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| | 350(1.5s) 550 <!-- SF6 flow -->
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| | 5 <!-- O2 flow -->
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| | 2800 <!-- coil power -->
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| | 140(1.5s) 45 <!-- platen power -->
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| |[[Specific Process Knowledge/Etch/DRIE-Pegasus/processA/PrA-0 | 4]] <!-- link processes -->
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| | Step 2 original recipe <!-- keywords -->
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| |-
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| ! PrA-1 <!-- step -->
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| | 20 <!-- chiller temp -->
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| ! 3.5 <!-- dep time -->
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| | 25 <!-- dep pressure -->
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| | 200 <!-- C4F8 flow -->
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| | 2000 <!-- coil power -->
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| | 7.0 <!-- etch time -->
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| | 25(1.5s) 150 <!-- etch pressure -->
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| | 350(1.5s) 550 <!-- SF6 flow -->
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| | 5 <!-- O2 flow -->
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| | 2800 <!-- coil power -->
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| | 140(1.5s) 45 <!-- platen power -->
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| |[[Specific Process Knowledge/Etch/DRIE-Pegasus/processA/PrA-1 | 4]] <!-- link processes -->
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| | Shorter dep cycle <!-- keywords -->
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| |-
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| ! PrA-2 <!-- step -->
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| | 20 <!-- chiller temp -->
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| | 4 <!-- dep time -->
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| | 25 <!-- dep pressure -->
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| ! 150 <!-- C4F8 flow -->
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| | 2000 <!-- coil power -->
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| | 7.0 <!-- etch time -->
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| | 25(1.5s) 150 <!-- etch pressure -->
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| | 350(1.5s) 550 <!-- SF6 flow -->
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| | 5 <!-- O2 flow -->
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| | 2800 <!-- coil power -->
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| | 140(1.5s) 45 <!-- platen power -->
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| | [[Specific Process Knowledge/Etch/DRIE-Pegasus/processA/PrA-2 | 4]] <!-- link processes -->
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| | Lower C<sub>4</sub>F<sub>8</sub> flow in dep cycle <!-- keywords -->
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| |-
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| |}
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| |[[Specific Process Knowledge/Etch/DRIE-Pegasus/processA/ProcessLog | Process Log entries]]
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