Specific Process Knowledge/Etch/DRIE-Pegasus: Difference between revisions
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!colspan="2" border="none" style="background:silver; color:black;" align="center"|Equipment | !colspan="2" border="none" style="background:silver; color:black;" align="center"|Equipment | ||
|style="background:silver; color:black"|[[Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-1| '''DRIE-Pegasus 1''']] | |style="background:silver; color:black" width="100" |[[Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-1| '''DRIE-Pegasus 1''']] | ||
|style="background:silver; color:black"|[[Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2| '''DRIE-Pegasus 2''']] | |style="background:silver; color:black"|[[Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2| '''DRIE-Pegasus 2''']] | ||
|style="background:silver; color:black"|[[Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-3| '''DRIE-Pegasus 3''']] | |style="background:silver; color:black"|[[Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-3| '''DRIE-Pegasus 3''']] | ||