Specific Process Knowledge/Etch/DRIE-Pegasus: Difference between revisions

@@ Line 170: / Line 170: @@
 * Ar: 0 to 283 sccm
 |style="background:lightgrey; color:black"|
-* SF<sub>6</sub>: 0 to 1200 sccm
+* SF<sub>6</sub>
-* O<sub>2</sub>: 0 to 200 sccm
+* O<sub>2</sub>
-* C<sub>4</sub>F<sub>8</sub>: 0 to 400 sccm
+* C<sub>4</sub>F<sub>8</sub>
-* Ar: 0 to 283 sccm
+* Ar
 |style="background:lightgrey; color:black"|
-* SF<sub>6</sub>: 0 to 1200 sccm
+{|
-* O<sub>2</sub>: 0 to 200 sccm
+| * SF<sub>6</sub>
-* C<sub>4</sub>F<sub>8</sub>: 0 to 400 sccm
+| * O<sub>2</sub>
-* Ar: 0 to 283 sccm
+| * C<sub>4</sub>F<sub>8</sub>
+|-
+| * Ar
+| * He
+| * CF<sub>4</sub>
+|-
+| * H<sub>2</sub>
+|
+|
+|}
 |-
 |style="background:whitesmoke; color:black"|Pressure and temperature