Specific Process Knowledge/Etch/DRIE-Pegasus: Difference between revisions

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 !style="background:silver; color:black" align="center" valign="center" rowspan="4"|Process parameter range
-|style="background:LightGrey; color:black"|RF powers
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 * Coil Power 5 kW
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 |style="background:LightGrey; color:black"|Gas flows
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 * SF<sub>6</sub>: 0 to 1200 sccm
 * O<sub>2</sub>: 0 to 200 sccm