Specific Process Knowledge/Etch/DRIE-Pegasus: Difference between revisions
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| style="background:lightgrey; color:black" | Barc etch | | style="background:lightgrey; color:black" | Barc etch | ||
| style="background:lightgrey; color:black" | Silicon etcher | | style="background:lightgrey; color:black" | Silicon etcher | ||
|- valign="top" | |- valign="top" | ||
! rowspan="7" style="background:silver; color:black" | General description | ! rowspan="7" style="background:silver; color:black" | General description | ||