Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-1: Difference between revisions
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'''Feedback to this page: | |||
[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Etch/DRIE-Pegasus click here]''' | |||
[[Category: Equipment |Etch DRIE]] | |||
[[Category: Etch (Dry) Equipment|DRIE]] | |||
= DRIE-Pegasus 1= | |||
[[Image:DRIE-Pegasus.jpg |frame|left|x300px|The DRIE-Pegasus 1 load lock and cassette loader in the Danchip cleanroom A-1]] | [[Image:DRIE-Pegasus.jpg |frame|left|x300px|The DRIE-Pegasus 1 load lock and cassette loader in the Danchip cleanroom A-1]] | ||