Specific Process Knowledge/Etch/DRIE-Pegasus: Difference between revisions
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The DRIE Pegasus tools are state-of-art silicon dry etchers that offer outstanding performance in terms of etch rate, uniformity etc. They use the so-called Bosch process to achieve excellent control of the etched features. Click [[Specific_Process_Knowledge/Etch/DRIE-Pegasus/System-description|'''HERE''']] for more fundamental information of the system. As of 2017, completing the [[LabAdviser/Courses#The_Dry_Etch_TPT | Dry Etch TPT course]] is mandatory for all new users. On the TPT web page you will find a version of the latest lecture slides - here you will find information as well. | The DRIE Pegasus tools are state-of-art silicon dry etchers that offer outstanding performance in terms of etch rate, uniformity etc. They use the so-called Bosch process to achieve excellent control of the etched features. Click [[Specific_Process_Knowledge/Etch/DRIE-Pegasus/System-description|'''HERE''']] for more fundamental information of the system. As of 2017, completing the [[LabAdviser/Courses#The_Dry_Etch_TPT | Dry Etch TPT course]] is mandatory for all new users. On the TPT web page you will find a version of the latest lecture slides - here you will find information as well. | ||
== Links to the individual pages for the Pegasi == | |||
* [[Specific_Process_Knowledge/Etch/DRIE-Pegasus/Pegsus-1|DRIE/Pegasus 1]] | |||
* [[Specific_Process_Knowledge/Etch/DRIE-Pegasus/Pegsus-2|DRIE/Pegasus 2]] | |||
* [[Specific_Process_Knowledge/Etch/DRIE-Pegasus/Pegsus-3|DRIE/Pegasus 3]] | |||
* [[Specific_Process_Knowledge/Etch/DRIE-Pegasus/Pegsus-4|DRIE/Pegasus 4]] | |||
'''The user manual(s), quality control procedure(s) and results, user APV(s), technical information and contact information can be found in LabManager:''' | '''The user manual(s), quality control procedure(s) and results, user APV(s), technical information and contact information can be found in LabManager:''' | ||