Specific Process Knowledge/Etch/DRIE-Pegasus: Difference between revisions
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| [[Image:Pegasus 2 operator.jpg |frame|x300px|The-Pegasus 2 operator station and load lock in the Danchip cleanroom A-1]] | | [[Image:Pegasus 2 operator.jpg |frame|x300px|The-Pegasus 2 operator station and load lock in the Danchip cleanroom A-1]] | ||
|- | |- | ||
| DRIE-Pegasus 1 | | align="center" | DRIE-Pegasus 1 | ||
| DRIE-Pegasus 2 | | align="center" | DRIE-Pegasus 2 | ||
|- | |- | ||
| align="center" | Serial MP0636 | | align="center" | Serial MP0636 | ||
| Serial MP0641 | | align="center" | Serial MP0641 | ||
|} | |} | ||