Specific Process Knowledge/Etch/DRIE-Pegasus: Difference between revisions

Revision as of 13:37, 25 June 2018 view source Jmli (talk \| contribs) DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers 4,579 edits →The DRIE Pegasus tools at Danchip ← Older edit		Revision as of 13:37, 25 June 2018 view source Jmli (talk \| contribs) DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers 4,579 edits →The DRIE Pegasus tools at Danchip Newer edit →
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	Then, in 2017 we got our hands on a twin Pegasus system with cassette to cassette vacuum robot at a very reasonable price from a commerciel fab. The twin Pegasus system (will be called Pegasus 3 and 4) will be installed at the old cluster 2 location in cleanroom C1 from August 2018 onwards.		Then, in 2017 we got our hands on a twin Pegasus system with cassette to cassette vacuum robot at a very reasonable price from a commerciel fab. The twin Pegasus system (will be called Pegasus 3 and 4) will be installed at the old cluster 2 location in cleanroom C1 from August 2018 onwards.


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