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Specific Process Knowledge/Etch/DRIE-Pegasus: Difference between revisions

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[[Image:DRIE-Pegasus.jpg |left|300px|The DRIE-Pegasus 1 in the Danchip cleanroom A-1]]
[[Image:DRIE-Pegasus.jpg |left|300px|The DRIE-Pegasus 1 in the Danchip cleanroom A-1]]
[[Image:Pegasus 2 operator.jpg |right|300px|The-Pegasus 2 in the Danchip cleanroom A-1]]
[[Image:Pegasus 2 operator.jpg |center|300px|The-Pegasus 2 in the Danchip cleanroom A-1]]