Specific Process Knowledge/Etch/III-V ICP/InP-InGaAsP-InGaAs: Difference between revisions
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<gallery caption="Result of InP etching." widths="500px" heights="400px" perrow="3"> | <gallery caption="Result of InP etching." widths="500px" heights="400px" perrow="3"> | ||
Image:S0_oxide_01.jpg | Image:S0_oxide_01.jpg|Top view of the SiO2 mask before etching | ||
Image:S0_oxide_02.jpg | Image:S0_oxide_02.jpg|Top view of the SiO2 mask before etching | ||
</gallery> | </gallery> | ||