Specific Process Knowledge/Etch/III-V ICP/InP-InGaAsP-InGaAs: Difference between revisions
Appearance
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Image:S4_30dg_midt_10.jpg| 30 dg view: low roughness in the trenches | Image:S4_30dg_midt_10.jpg| 30 dg view: low roughness in the trenches | ||
Image:S4_30dg_midt_11.jpg|30 dg view: low roughness in the trenches | Image:S4_30dg_midt_11.jpg|30 dg view: low roughness in the trenches | ||
Image:S4_midt_05.jpg|: | Image:S4_midt_05.jpg|Top view: low roughness in trench and in the large area | ||
</gallery> | </gallery> | ||