Specific Process Knowledge/Etch/III-V ICP/InP-InGaAsP-InGaAs: Difference between revisions

From LabAdviser
Bghe (talk | contribs)
Bghe (talk | contribs)
Line 61: Line 61:
===With InP piece on Si carrier===
===With InP piece on Si carrier===
InP piece patterned with SiO2. The pice was etched on topof a Siwafer with out bonding. The InP etch was used.
InP piece patterned with SiO2. The pice was etched on topof a Siwafer with out bonding. The InP etch was used.
<gallery caption="Result of InP etching."  width="5000px" height="4000px" perrow="3">
<gallery caption="Result of InP etching."  widths="500px" heights="400px" perrow="3">
Image:S1_00.jpg
 
Image:S1_30dg_01.jpg
Image:S1_30dg_02.jpg
Image:S1_30dg_03.jpg
Image:S1_30dg_04.jpg
Image:S1_30dg_05.jpg
Image:S1_30dg_06.jpg
Image:S1_30dg_07.jpg
Image:S1_30dg_08.jpg
Image:S1_30dg_09.jpg
Image:S1_30dg_09.jpg
Image:S1_30dg_10.jpg
Image:S1_30dg_10.jpg
Image:S1_30dg_midt_14.jpg
Image:S1_30dg_midt_13.jpg
Image:S1_30dg_midt_12.jpg
Image:S1_30dg_midt_11.jpg
Image:S1_30dg_midt_11.jpg
Image:S1_30dg_midt_12.jpg
Image:S1_30dg_midt_13.jpg
Image:S1_30dg_midt_14.jpg
</gallery>
</gallery>

Revision as of 12:17, 19 June 2018

Feedback to this page: click here

InP/InGaAsP/InGaAs etch

Unselective etch for large sized features and small aspect ratios by David Larsson, DTU Photonics, 2011

Recipe InP Etch 1/InP Precond 1
Cl2 flow 20 sccm
N2 flow 40 sccm
Ar flow 10 sccm
Platen power 100 W
Coil power 500 W
Pressure 2 mTorr
Platen chiller temperature 180 oC


Results (InP Etch 1)
Etch rate 500-600 nm/min
Sidewall angle 86-87 o
Selectivity (InP:SiO2, InP:HSQ) 50:1

InP etching June 2018

With InP piece on Si carrier

InP piece patterned with SiO2. The pice was etched on topof a Siwafer with out bonding. The InP etch was used.