Specific Process Knowledge/Etch/RIE (Reactive Ion Etch): Difference between revisions
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*[[Specific Process Knowledge/Etch/Etching of Silicon Oxide/SiO2 etch using RIE1 or RIE2|Etch of Silicon Oxide using RIE]] | *[[Specific Process Knowledge/Etch/Etching of Silicon Oxide/SiO2 etch using RIE1 or RIE2|Etch of Silicon Oxide using RIE]] | ||
*[[Specific Process Knowledge/Etch/Etching of Silicon Nitride/Etch of Silicon Nitride using RIE|Etch of Silicon Nitride using RIE]] | *[[Specific Process Knowledge/Etch/Etching of Silicon Nitride/Etch of Silicon Nitride using RIE|Etch of Silicon Nitride using RIE]] | ||
*[[Specific Process Knowledge/Etch/Etching of polymer/Etch of Photo Resist using RIE|Etch of Photo Resist using RIE]] | |||
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