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Specific Process Knowledge/Thin film deposition/Temescal: Difference between revisions

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'''The user manual(s), quality control procedure(s) and results, user APV(s), technical information and contact information can be found in LabManager:'''  
'''The user manual, user APV, and contact information can be found in LabManager:'''  
<!-- remember to remove the type of documents that are not present -->
<!-- remember to remove the type of documents that are not present: quality control procedure(s) and results, technical information -->


<!-- give the link to the equipment info page in LabManager: -->
<!-- give the link to the equipment info page in LabManager: -->
[http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=326 RIE1 in LabManager]
[http://labmanager.dtu.dk/function.php?module=Machine&view=view&page_id=169 E Beam Evaporator (Temescal) in LabManager]


== Process information ==
== Process information ==