Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 01 processing: Difference between revisions

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 The pixel-size of the DMD in the ligner: Maskless 01 is 0.5µmX0.5µm (at the sample surface). The lithographic resolution of the machine is 1µm on paper, which was demonstrated in the acceptance test after installation using a resist thickness of 0.5µm. This result has later been confirmed. In 1.5µm thick resist, the resolution is around 2µm.
-The table below shows the result of a resolution test using 1.5µm and 0.5µm positive resist.
+The table below shows the result of a resolution test using 1.5µm and 0.5µm positive resist. For 1.5µm resist the resolution is 2µm (maybe even a little lower), while it is 1µm (or at least close to) for 0.5µm resist. Also evident in the pictures is the (optical) proximity effect (not to be confused with the proximity (gap) effect in contact lithography); corners are rounded, and the smallest lines show a different width for the central line compared to the outer ones. ''Optical Proximity Correction'' is the practice of augmenting the design in order achieve the desired size and shape in the finished print.
 ... The effect of corner correction is significant below 2µm, but negligible above 4µm.