Specific Process Knowledge/Characterization/SEM: Scanning Electron Microscopy: Difference between revisions
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!Best obtainable lateral resolution (strongly dependent on user skills and sample type) | !Best obtainable lateral resolution (strongly dependent on user skills and sample type) | ||
|Down to 1-2 nm | |Down to 1-2 nm (Limiting factor: Beam) | ||
|Down to 10 nm | |Down to 10 nm (Limiting factor: Vibrations) | ||
|Down to 20-30 nm | |Down to 20-30 nm (Limiting factor: Vibrations) | ||
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!General availability | !General availability | ||