Specific Process Knowledge/Etch/DRIE-Pegasus/System-description: Difference between revisions
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* 20 W platen power | * 20 W platen power | ||
* Automatic matching | * Automatic matching | ||
showing the values of the Load and Tune positions. The only process parameter that changes is the pressure - along the X axis one can see the different pressure settings. | showing the values of the Load (blue) and Tune (red) positions. The only process parameter that changes is the pressure - along the X axis one can see the different pressure settings. | ||
[[File:RF matching 2.jpg|600px]] | [[File:RF matching 2.jpg|600px|thumb]] | ||
One can see that | |||