Specific Process Knowledge/Characterization/XPS: Difference between revisions
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The XPS instrument enables elemental analysis, chemical state analysis on the sample surface or deeper down by a depth profiling. A comparison about techniques and instruments used for elemental analysis at Danchip can be found on the page [[Specific Process Knowledge/Characterization/Element analysis|Element analysis]]. | The XPS instrument enables elemental analysis, chemical state analysis on the sample surface or deeper down by a depth profiling. A comparison about techniques and instruments used for elemental analysis at Danchip can be found on the page [[Specific Process Knowledge/Characterization/Element analysis|Element analysis]]. | ||
More about the different possibilities of the XPS instrument is found here: | More about the different possibilities of the XPS instrument is found here: | ||
*[http://www.chem.qmul.ac.uk/surfaces/scc/scat5_1.htm Surface sensitivity & specificity] | |||
*[http://www.chem.qmul.ac.uk/surfaces/scc/scat5_3.htm Photoelectron Spectroscopy (XPS and UPS)] | |||
*[[Specific Process Knowledge/Characterization/XPS/XPS technique|The XPS technique]] | *[[Specific Process Knowledge/Characterization/XPS/XPS technique|The XPS technique]] | ||
*[[Specific Process Knowledge/Characterization/XPS/XPS elemental composition|Elemental analysis]] | *[[Specific Process Knowledge/Characterization/XPS/XPS elemental composition|Elemental analysis]] | ||