Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 01 processing: Difference between revisions
| Line 48: | Line 48: | ||
|-style="background:WhiteSmoke; color:black" | |-style="background:WhiteSmoke; color:black" | ||
|1.5µm AZ 5214E | |1.5µm AZ 5214E | ||
Dose: 80, | Dose: 80, defoc: -3 | ||
Development: SP 60s | Development: SP 60s | ||
|[[Image:AZ5214E 1,5um 80dose -3defoc SP30s lines50x.jpg|350px]] | |[[Image:AZ5214E 1,5um 80dose -3defoc SP30s lines50x.jpg|350px]] | ||
| Line 56: | Line 57: | ||
|-style="background:WhiteSmoke; color:black" | |-style="background:WhiteSmoke; color:black" | ||
|0.5µm AZ 5214E (diluted) | |0.5µm AZ 5214E (diluted) | ||
Dose: 80, | Dose: 80, defoc: -3 | ||
Development: SP 30s | Development: SP 30s | ||
|[[Image:AZ5204E 0,5um 80dose -3defoc SP30s lines50x.jpg|350px]] | |[[Image:AZ5204E 0,5um 80dose -3defoc SP30s lines50x.jpg|350px]] | ||