Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 01 processing: Difference between revisions
| Line 55: | Line 55: | ||
|- | |- | ||
|-style="background:WhiteSmoke; color:black" | |-style="background:WhiteSmoke; color:black" | ||
|0. | |0.5µm AZ 5214E (diluted) | ||
Dose: 80, Defoc: -3 | Dose: 80, Defoc: -3 | ||
Development: SP 30s | Development: SP 30s | ||
|[[Image: | |[[Image:AZ5204E 0,5um 80dose -3defoc SP30s lines50x.jpg|350px]] | ||
|[[Image: | |[[Image:AZ5204E 0,5um 80dose -3defoc OPC0,5 SP30s lines50x.jpg|350px]] | ||
|} | |} | ||