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Specific Process Knowledge/Characterization/XPS/XPS elemental composition: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
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[[File:Overview spectra Labadvisor.JPG|600px|XPS spectrum of a sample consisting of the elements silicon, oxygen and carbon. ]]
[[File:Overview spectra Labadvisor.JPG|600px|XPS spectrum of a sample consisting of the elements silicon, oxygen and carbon. ]]


Each element has a unique set of electronic states
With a unique set of electronic states, each element has its own specific "finger-print" in the XPS spectrum.  
Each element give a specific "finger-print" in the XPS spectrum. The binding energy of the electrons in atoms are different for all elements, and when measuring a photoelectron spectrum over a wide range of energies, the main line from each element will be placed at a specific energy in the spectrum.  
 
In the table below, one can see the set
 
in atoms are different for all elements, and when measuring a photoelectron spectrum over a wide range of energies, the main line from each element will be placed at a specific energy in the spectrum.  


Here is shown a spectrum measured over the energy range 0-1350 eV, and characteristic lines from three elements (C,O and Si) are seen and indicated in the spectrum.
Here is shown a spectrum measured over the energy range 0-1350 eV, and characteristic lines from three elements (C,O and Si) are seen and indicated in the spectrum.
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