Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 01 processing: Difference between revisions
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[[Image:section under construction.jpg|70px]] | [[Image:section under construction.jpg|70px]] | ||
Aligner: Maskless 01 is not a direct writer. | Aligner: Maskless 01 is not a direct writer. | ||
The maskless aligner uses a spatial light modulator, much like in a projektor, and exposes an area of the design at a time. The wafer is exposed by stepping the exposure field across the wafer | |||
=Process Parameters= | =Process Parameters= | ||