Specific Process Knowledge/Thin film deposition/PECVD: Difference between revisions
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Name PECVD4: PRO CVD <br> | Name PECVD4: PRO CVD <br> | ||
Vendor: SPTS <br> | Vendor: SPTS <br> | ||
[[image:PECVD3a.jpg|200x200px|right|thumb|PECVD3 - positioned in cleanroom A-1]] | [[image:PECVD3a.jpg|200x200px|right|thumb|PECVD3 - positioned in cleanroom A-1]] | ||
[[image:PECVD4.JPG|200x200px|right|thumb|PECVD4 - positioned in cleanroom B-1]] | [[image:PECVD4.JPG|200x200px|right|thumb|PECVD4 - positioned in cleanroom B-1]] | ||