Specific Process Knowledge/Etch/DryEtchProcessing/Comparison: Difference between revisions
| Line 190: | Line 190: | ||
* Sapphire | * Sapphire | ||
* SiC | * SiC | ||
* Some polymers | |||
*<5% metal on the suface (for 4") | |||
| style="background:lightgrey; color:black" | | | style="background:lightgrey; color:black" | | ||
* Silicon | * Silicon | ||