Specific Process Knowledge/Etch/Etching of Silicon Nitride: Difference between revisions
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*Silicon Nitride | *Silicon Nitride | ||
*Aluminium | *Aluminium | ||
*Metals if they cover less than 5% of the wafer area | *Metals if they cover less than 5% of the wafer area | ||
| | | | ||
*Photoresist | *Photoresist | ||