Specific Process Knowledge/Thin film deposition/PECVD: Difference between revisions
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==PECVD Plasma Enhanced Chemical Vapor Deposition== | ==PECVD Plasma Enhanced Chemical Vapor Deposition== | ||
Name PECVD4: PRO CVD <br> | |||
Vendor: SPTS <br> | |||
[[image:Cluster2x.jpg|200x200px|right|thumb|PECVD2 (part of cluster2) - positioned in cleanroom C-1]] | [[image:Cluster2x.jpg|200x200px|right|thumb|PECVD2 (part of cluster2) - positioned in cleanroom C-1]] | ||
[[image:PECVD3a.jpg|200x200px|right|thumb|PECVD3 - positioned in cleanroom A-1]] | [[image:PECVD3a.jpg|200x200px|right|thumb|PECVD3 - positioned in cleanroom A-1]] | ||