Specific Process Knowledge/Etch/DRIE-Pegasus: Difference between revisions
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[[Image:DRIE-Pegasus.jpg |300x300px|thumb|The SPTS Pegasus in the Danchip cleanroom A-1]] | [[Image:DRIE-Pegasus.jpg |300x300px|thumb|The SPTS Pegasus in the Danchip cleanroom A-1]] | ||
Name: PRO ICP - DRIE Pegasus (Deep Reactive Ion Etcher) <br> | |||
Vendor: STS (now SPTS) <br> | |||
'''The Bosch process''' | '''The Bosch process''' | ||