Specific Process Knowledge/Lithography/EBeamLithography: Difference between revisions
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= E-beam resists = | = E-beam resists = | ||
For info regarding E-beam resist in E-beam evaporating equiptment see here:[[http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Thin_film_deposition/Wordentec#Process_information]] | For info regarding E-beam resist in E-beam evaporating equiptment see here:[[http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Thin_film_deposition/Wordentec#Process_information/ process_information]] | ||
<span style="font-size: 90%; text-align: right;">[[Specific_Process_Knowledge/Lithography/EBeamLithography#top|Go to top of this page]]</span> | <span style="font-size: 90%; text-align: right;">[[Specific_Process_Knowledge/Lithography/EBeamLithography#top|Go to top of this page]]</span> | ||