Specific Process Knowledge/Lithography/EBeamLithographyManual: Difference between revisions

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	To request for an e-beam training session, contact e-beam@~~danchip~~.dtu.dk; a DTU ~~Danchip~~ personnel will hereafter provide a time slot. For safety reasons, even fully trained users are only authorized to mount substrates into the e-beam cassettes but not authorized to load the cassettes into the autoloader.		To request for an e-beam training session, contact e-beam@nanolab.dtu.dk; a DTU Nanolab personnel will hereafter provide a time slot. For safety reasons, even fully trained users are only authorized to mount substrates into the e-beam cassettes but not authorized to load the cassettes into the autoloader.