Specific Process Knowledge/Lithography/EBeamLithographyManual: Difference between revisions
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The original JEOL manual for the e-beam writer FS9500 is located on the O-drive: O:\CleanroomDrive\_Equipment\E-beam | The original JEOL manual for the e-beam writer FS9500 is located on the O-drive: O:\CleanroomDrive\_Equipment\E-beam | ||
Technical Specification | |||
==Technical Specification== | |||
The system can be characterized as follows: | The system can be characterized as follows: | ||