Specific Process Knowledge/Thermal Process/Dope with Boron: Difference between revisions
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All this figures have been made at the time where there was a furnace only for Boron Pre-dep (furnace A2). The process was done at a temperature of 1125 <sup>o</sup>C and a flow of 5 slm N<sub>2</sub> and 0.2 slm of O<sub>2</sub>. | All this figures have been made at the time where there was a furnace only for Boron Pre-dep (furnace A2). The process was done at a temperature of 1125 <sup>o</sup>C and a flow of 5 slm N<sub>2</sub> and 0.2 slm of O<sub>2</sub>. | ||
<gallery caption="Boron profiles from SIMS " widths="400px" heights="300px" perrow="3"> | <gallery caption="Boron profiles from SIMS " widths="400px" heights="300px" perrow="3"> | ||
image:borprofil_1tim.jpg|Pre-depostion for 1 hour at 1125 °C | image:borprofil_1tim.jpg|Pre-depostion for 1 hour at 1125 °C | ||
image:borprofil_6tim.jpg|Pre-depostion for 6 hour at 1125 °C | image:borprofil_6tim.jpg|Pre-depostion for 6 hour at 1125 °C | ||
image:borprofil_16tim.jpg|Pre-depostion for 16 hour at 1125 °C | image:borprofil_16tim.jpg|Pre-depostion for 16 hour at 1125 °C | ||
</gallery> | </gallery> | ||
<gallery caption="Boron diffusion depth vs. pre-deposition time" widths="400px" heights="300px" perrow="3"> | <gallery caption="Boron diffusion depth vs. pre-deposition time" widths="400px" heights="300px" perrow="3"> | ||
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==Boron pre-deposition== | ==Boron pre-deposition== | ||