Specific Process Knowledge/Characterization/Hardness measurement

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Hardness tester

Hardness tester. Positioned in cleanroom F-2

The purpose is to measure hardness of samples or films. This is done by pressing an indenter (a small pyramid-shaped diamond tip) into sample using a known indentation force. This leaves an indent in the sample. The hardness of the sample can then be derived from the dimensions of the indentation (the softer the material the larger the indentation). The samples should have a reasonably low roughness. Otherwise it can be quite difficult to determine the roughness reliably.

The user manual, technical information and contact information can be found in LabManager:

Equipment info for: Hardness tester

Quality Control - Recipe Parameters and Limits

Quality Control (QC) for the hardness tester

There is no scheduled calibration of this machine. We do however have three calibration samples which can be used to verify proper operation of the machine. The calibration samples are also good for practicing the measurement procedure. The calibration samples are available in the following three hardnesses: 2xx HV, 4xx HV and 6xx HV.

Equipment performance and process related parameters

Purpose	Hardness tester	Sample hardness (Vickers) Film hardness (Vickers)
Performance	Available test forces	0,098 N (0,01 kgf) 0,24 N (0,025 kgf) 0,49 N (0,05 kgf) 0,98 N (0,1 kgf) 1,96 N (0,2 kgf) 2,94 N (0,3 kgf) 4,9 N (0,5 kgf) 9,8 N (1 kgf) 19,6 N (2 kgf)
	Data output	Machine can calculate hardness in HV (Hardness Vickers) and show result on display The integrated printer has been disabled (not cleanroom compatible)
Substrates	Batch size	One sample
	Substrate materials allowed	No restrictions (besides sample must be dry and free from chemical residues)
	Calibration samples available	277HV 464HV 704HV