Specific Process Knowledge/Characterization/Hardness measurement: Difference between revisions

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The measured standard hardnesses are 2xx HV, 4xx HV and 6xx HV. The QC is performed x times a year.
There is no scheduled calibration of this machine. We do however have three calibration samples which can be used to verify proper operation of the machine. The calibration samples are also good for practicing the measurement procedure. The calibration samples are available in the following three hardnesses: 2xx HV, 4xx HV and 6xx HV.
*[http://www.labmanager.danchip.dtu.dk/d4Show.php?id=1831&mach=xxx The QC procedure]<br>
 
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==Equipment performance and process related parameters==
==Equipment performance and process related parameters==

Revision as of 12:44, 25 January 2018

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Hardness tester

Hardness tester. Positioned in cleanroom F-2

The purpose is to measure hardness of samples or films. This is done by pressing an indenter (a small pyramid-shaped diamond tip) into sample using a known indentation force. This leaves an indent in the sample. The hardness of the sample can then be derived from the dimensions of the indentation (the softer the material the larger the indentation).


The user manual, technical information and contact information can be found in LabManager:

Equipment info for: Hardness tester

Quality Control - Recipe Parameters and Limits

Quality Control (QC) for the hardness tester

There is no scheduled calibration of this machine. We do however have three calibration samples which can be used to verify proper operation of the machine. The calibration samples are also good for practicing the measurement procedure. The calibration samples are available in the following three hardnesses: 2xx HV, 4xx HV and 6xx HV.

Equipment performance and process related parameters

Purpose

Hardness tester

  • Sample hardness (Vickers)
  • Film hardness (Vickers)

Performance

Available test forces

  • 0,098 N (0,01 kgf)
  • 0,24 N (0,025 kgf)
  • 0,49 N (0,05 kgf)
  • 0,98 N (0,1 kgf)
  • 1,96 N (0,2 kgf)
  • 2,94 N (0,3 kgf)
  • 4,9 N (0,5 kgf)
  • 9,8 N (1 kgf)
  • 19,6 N (2 kgf)

Data output

  • Machine can calculate hardness in HV (Hardness Vickers) and show result on display

Substrates

Batch size

  • One sample

Substrate materials allowed

  • No restrictions (besides sample must be dry and free from chemical residues)