Specific Process Knowledge/Wafer and sample drying/Spin Dryers: Difference between revisions
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|style="background:WhiteSmoke; color:black"|<b>Spin dryer 2</b> | |style="background:WhiteSmoke; color:black"|<b>Spin dryer 2</b> | ||
|style="background:WhiteSmoke; color:black"|<b>Spin dryer 3</b> | |style="background:WhiteSmoke; color:black"|<b>Spin dryer 3</b> | ||
|style="background:WhiteSmoke; color:black"|<b>Spin dryer 4</b> | |||
|style="background:WhiteSmoke; color:black"|<b>Spin dryer 5</b> | |||
|- | |- | ||
!style="background:silver; color:black;" align="center" width="60"|Location | !style="background:silver; color:black;" align="center" width="60"|Location | ||
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|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
*D-3 | *D-3 | ||
|style="background:WhiteSmoke; color:black"| | |||
*D-3 | |||
|style="background:WhiteSmoke; color:black"| | |||
*F-3 | |||
|- | |- | ||
!style="background:silver; color:black;" align="center" width="60"|Purpose | !style="background:silver; color:black;" align="center" width="60"|Purpose | ||
|style="background:LightGrey; color:black"| | |style="background:LightGrey; color:black"| | ||
|style="background:WhiteSmoke; color:black"| | |||
*Drying | |||
*Rinsing + drying | |||
|style="background:WhiteSmoke; color:black"| | |||
*Drying | |||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
*Drying | *Drying | ||
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*1-25 100 mm wafers | *1-25 100 mm wafers | ||
*1-25 150 mm wafers | *1-25 150 mm wafers | ||
|style="background:WhiteSmoke; color:black"| | |||
*1-25 100 mm wafers | |||
*1-25 150 mm wafers | |||
|style="background:WhiteSmoke; color:black"| | |||
*1-25 100 mm wafers | |||
*1-25 150 mm wafers | |||
*1-25 200 mm wafers | |||
|- | |- | ||
| style="background:LightGrey; color:black"|Allowed materials | | style="background:LightGrey; color:black"|Allowed materials | ||
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|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
*Only for RCA cleaned wafers | *Only for RCA cleaned wafers | ||
|style="background:WhiteSmoke; color:black"| | |||
*No restrictions | |||
|style="background:WhiteSmoke; color:black"| | |||
*No restrictions | |||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
*No restrictions | *No restrictions | ||
|- | |- | ||
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