Specific Process Knowledge/Characterization/Hardness measurement: Difference between revisions

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Hardness tester
Hardness tester
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*Sample hardness
*Sample hardness (Vickers)
*Film hardness
*Film hardness (Vickers)
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Performance
Performance
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Indent force
Available test forces
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*0,05N
*0,098 N (0,01 kgf)
*0,15N
*0,24 N (0,025 kgf)
*0,49 N (0,05 kgf)
*0,98 N (0,1 kgf)
*1,96 N (0,2 kgf)
*2,94 N (0,3 kgf)
*4,9 N (0,5 kgf)
*9,8 N (1 kgf)
*19,6 N (2 kgf)
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Revision as of 14:25, 19 January 2018

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Hardness tester

Hardness tester. Positioned in cleanroom F-2

The purpose is to measure hardness of samples or films. This is done by pressing an indenter (a small pyramid-shaped diamond tip) into sample using a know indentation force. This leaves an indent in the sample. The hardness of the sample can then be derived from the dimensions of the indentation (the softer the material the large the indentation).


The user manual, technical information and contact information can be found in LabManager:

Hardness tester

Quality Control - Recipe Parameters and Limits

Quality Control (QC) for the hardness tester

The measured standard hardnesses are 2xx HV, 4xx HV and 6xx HV. The QC is performed x times a year.


Equipment performance and process related parameters

Purpose

Hardness tester

  • Sample hardness (Vickers)
  • Film hardness (Vickers)

Performance

Available test forces

  • 0,098 N (0,01 kgf)
  • 0,24 N (0,025 kgf)
  • 0,49 N (0,05 kgf)
  • 0,98 N (0,1 kgf)
  • 1,96 N (0,2 kgf)
  • 2,94 N (0,3 kgf)
  • 4,9 N (0,5 kgf)
  • 9,8 N (1 kgf)
  • 19,6 N (2 kgf)

Substrates

Batch size

  • One sample
Substrate materials allowed
  • No restrictions (besides sample must be dry and free from chemical residues)