Specific Process Knowledge/Characterization/Hardness measurement: Difference between revisions

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Hardness measurer
Hardness measurer
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*Sample thickness
*Sample hardness
*Film thickness
*Film hardness
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Revision as of 13:55, 19 January 2018

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Hardness measurer

Hardness Measurer. Positioned in cleanroom F-2

The purpose is to measure hardness of samples or films.


The user manual, technical information and contact information can be found in LabManager:

Hardness measurer

Quality Control - Recipe Parameters and Limits

Quality Control (QC) for the hardness measurer

The measured standard hardnesses are 2xx HV, 4xx HV and 6xx HV. The QC is performed x times a year.


Equipment performance and process related parameters

Purpose

Hardness measurer

  • Sample hardness
  • Film hardness

Performance

Indent force

  • 0,05N
  • 0,15N

Substrates

Batch size

  • One sample
Substrate materials allowed
  • No restrictions (besides sample must be dry and free from chemical residues)
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