Specific Process Knowledge/Characterization/Thickness Measurer: Difference between revisions
No edit summary |
|||
| Line 32: | Line 32: | ||
Purpose | Purpose | ||
|style="background:LightGrey; color:black"| | |style="background:LightGrey; color:black"| | ||
Thickness measurer | |||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
*Wafer thickness | *Wafer thickness | ||