Specific Process Knowledge/Characterization/Hardness measurement: Difference between revisions
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==Hardness measurer== | ==Hardness measurer== | ||
[[Image:Thicknessmeasurer2007.jpg|thumb|300x300px| | [[Image:Thicknessmeasurer2007.jpg|thumb|300x300px|Hardness Measurer. Positioned in cleanroom F-2]] | ||
The purpose is to measure | The purpose is to measure hardness of samples or films. | ||
'''The user manual, technical information and contact information can be found in LabManager:''' | '''The user manual, technical information and contact information can be found in LabManager:''' | ||
'''[http://www.labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach= | '''[http://www.labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=xxx Hardness measurer]''' | ||
==Quality Control - Recipe Parameters and Limits== | ==Quality Control - Recipe Parameters and Limits== | ||
{| border="1" cellspacing="2" cellpadding="2" colspan="3" | {| border="1" cellspacing="2" cellpadding="2" colspan="3" | ||
|bgcolor="#98FB98" |'''Quality Control (QC) for the | |bgcolor="#98FB98" |'''Quality Control (QC) for the hardness measurer''' | ||
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The measured standard | The measured standard hardnesses are 2xx HV, 4xx HV and 6xx HV. The QC is performed x times a year. | ||
*[http://www.labmanager.danchip.dtu.dk/d4Show.php?id=1831&mach= | *[http://www.labmanager.danchip.dtu.dk/d4Show.php?id=1831&mach=xxx The QC procedure]<br> | ||
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Hardness measurer | Hardness measurer | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
* | *Sample thickness | ||
* | *Film thickness | ||
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!style="background:silver; color:black" align="center"| | !style="background:silver; color:black" align="center"| | ||
Performance | Performance | ||
|style="background:LightGrey; color:black"| | |style="background:LightGrey; color:black"| | ||
Indent force | |||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
* | *0,05N | ||
*0,15N | |||
|- | |- | ||
!style="background:silver; color:black" align="center" valign="center" rowspan="2"| | !style="background:silver; color:black" align="center" valign="center" rowspan="2"| | ||
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| style="background:LightGrey; color:black"|Substrate materials allowed | | style="background:LightGrey; color:black"|Substrate materials allowed | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
*No restrictions | *No restrictions (besides sample must be dry and free from chemical residues) | ||
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Revision as of 13:48, 19 January 2018
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Hardness measurer
The purpose is to measure hardness of samples or films.
The user manual, technical information and contact information can be found in LabManager:
Quality Control - Recipe Parameters and Limits
| Quality Control (QC) for the hardness measurer |
|
The measured standard hardnesses are 2xx HV, 4xx HV and 6xx HV. The QC is performed x times a year. |
|
Purpose |
Hardness measurer |
|
|---|---|---|
|
Performance |
Indent force |
|
|
Substrates |
Batch size |
|
| Substrate materials allowed |
|