Specific Process Knowledge/Characterization/AFM: Atomic Force Microscopy: Difference between revisions
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|style="background:LightGrey; color:black"|Topografic measurement in the nanometer and and sub-micrometer regime | |style="background:LightGrey; color:black"|Topografic measurement in the nanometer and and sub-micrometer regime | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
*Surface roughness measurement | |||
*Step/structure hight measurement | |||
*Surface image | |||
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!style="background:silver; color:black" align="left"|Performance | !style="background:silver; color:black" align="left"|Performance | ||