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Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 01 processing: Difference between revisions

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Taran (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
3,526 edits
Taran (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
3,526 edits
Line 152: Line 152:
| -2.08±0.25
| -2.08±0.25
| -2.07±0.25
| -2.07±0.25
| -2.28±11.7
| -2.31±8.33
| 1.02±1.67
| 1.02±1.67


Line 160: Line 160:
| NA
| NA
| -0.33±0.18
| -0.33±0.18
| -0.34±0.20
| -0.34±0.19
| 1.22±2.33
| 1.20±1.67
| -0.46±5.89
| -0.46±5.89


Line 173: Line 173:
| -2.08±0.25
| -2.08±0.25
| -2.08±0.25
| -2.08±0.25
| -3.78±11.7
| -3.70±8.33
| 0.56±1.53
| 0.56±1.67


|-
|-
Line 180: Line 180:
|'''Y'''
|'''Y'''
| -12±1
| -12±1
| -0.22±0.15
| -0.22±0.35
| -0.21±0.05
| -0.21±0.08
| 6.44±2.33
| -6.30±1.67
| -0.93±5.89
| -0.93±5.89


Line 188: Line 188:
|-style="background:WhiteSmoke; color:black"
|-style="background:WhiteSmoke; color:black"
|rowspan="2"|2 alignment marks
|rowspan="2"|2 alignment marks
shifted +2µm in X
after calibration
(three samples)
|'''X'''
|'''X'''
|NA
|NA
|rowspan="2"|NA
|rowspan="2"|NA
| -0.25±0.15
| -0.22±0.25
| -0.26±0.11
| -0.19±0.19
| -1.33±2.33
| 1.85±2.08
| 5.28±1.67
| -0.09±2.92


|-
|-
Line 201: Line 202:
|'''Y'''
|'''Y'''
| NA
| NA
| -0.30±0.25
| -0.28±0.38
| -0.28±0.18
| -0.28±0.13
| -1.33±2.33
| 4.35±5.97
| 3.89±1.25
| -0.09±2.64


|}
|}
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