Specific Process Knowledge/Characterization/AFM: Atomic Force Microscopy: Difference between revisions
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!style="background:silver; color:black;" align="left"|Purpose | !style="background:silver; color:black;" align="left"|Purpose | ||
|style="background:LightGrey; color:black"|Topografic measurement in the nanometer and and sub-micrometer regime | |style="background:LightGrey; color:black"|Topografic measurement in the nanometer and and sub-micrometer regime | ||
*Surface roughness measurement | |style="background:WhiteSmoke; color:black"| | ||
*Step/structure hight measurement | *Surface roughness measurement | ||
*Surface image | *Step/structure hight measurement | ||
*Surface image | |||
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!style="background:silver; color:black" align="left"|Performance | !style="background:silver; color:black" align="left"|Performance | ||
|style="background:LightGrey; color:black"|Scan range xy | |style="background:LightGrey; color:black"|Scan range xy | ||
|style="background:WhiteSmoke; color:black"|Up to 90 µm square | |style="background:WhiteSmoke; color:black"|Up to 90 µm square | ||
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