Specific Process Knowledge/Lithography/EBeamLithography/2D detection system: Difference between revisions
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* you need to make a reference image in the SEM mode, and save as '''reference''' | * you need to make a reference image in the SEM mode, and save as '''reference''' | ||
[[image:SEM settings.jpg| | [[image:SEM settings.jpg|50px]] | ||
[[image:Image saving - reference.jpg|50px]] | |||
[[image:Mark detection.jpg|50px]] | |||