Specific Process Knowledge/Lithography/EBeamLithography/2D detection system: Difference between revisions

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=<span style="background:#FF2800">THIS PAGE IS UNDER CONSTRUCTION</span>[[image:Under_construction.png|200px]]=
In December 2017 we acquired a 2D mark detection system to aid troublesome detection on marks and extend the possibilities on the JEOL E-beam.
In December 2017 we acquired a 2D mark detection system to aid troublesome detection on marks and extend the possibilities on the JEOL E-beam.


This is a short quick guide to operating the 2D mark detection system, the full manual from JEOL (30 pages) can be found here: '''[[:File:2D mark detecting 20171212.pdf]]'''
This is a short quick guide to operating the 2D mark detection system, the full manual from JEOL (30 pages) can be found here: '''[[:File:2D mark detecting 20171212.pdf]]'''

Revision as of 10:24, 4 January 2018

THIS PAGE IS UNDER CONSTRUCTION

In December 2017 we acquired a 2D mark detection system to aid troublesome detection on marks and extend the possibilities on the JEOL E-beam.

This is a short quick guide to operating the 2D mark detection system, the full manual from JEOL (30 pages) can be found here: File:2D mark detecting 20171212.pdf