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Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 01 processing: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
3,526 edits
Taran (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
3,526 edits
Line 164: Line 164:
|NA
|NA
|rowspan="2"|NA
|rowspan="2"|NA
| -0.03±0.05
| -1.5±0.75
| 0.01±0.05
| -1.5±0.25
| 1.00±2.33
| 20.8±11.7
| 0.00±1.18
| 12.5±5.89


|-
|-
Line 173: Line 173:
|'''Y'''
|'''Y'''
| NA
| NA
| -0.05±0.05
| 0.00±0.25
| -0.07±0.05
| 0.00±0.25
| 0.42±2.33
| NA
| 0.00±1.18
| NA


|-
|-
Line 182: Line 182:
|rowspan="2"|4 alignment marks
|rowspan="2"|4 alignment marks
|'''X'''
|'''X'''
| 1±2
| -8
|rowspan="2" align="center"|0.002±0.001
|rowspan="2" align="center"|0.005
| 0.00±0.05
| -1.75±0.63
| 0.05±0.05
| -1.69±0.25
| -0.67±2.33
| 18.7±11.7
| -1.67±1.18
| 2.78±5.89


|-
|-
|-style="background:WhiteSmoke; color:black"
|-style="background:WhiteSmoke; color:black"
|'''Y'''
|'''Y'''
| -12±1
| 13
| -0.25±0.05
| 0.25±0.63
| -0.29±0.05
| 0.19±0.25
| 6.33±2.33
| NA
| -1.38±1.18
| NA


|}
|}
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