Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 01 processing: Difference between revisions
| Line 90: | Line 90: | ||
|- | |- | ||
|-style="background:silver; color:black" | |-style="background:silver; color:black" | ||
!colspan="2"| | !colspan="2"|MLA-MLA | ||
!Scaling [ppm] | !Scaling [ppm] | ||
!Shearing [mRad] | !Shearing [mRad] | ||
| Line 102: | Line 102: | ||
|-style="background:WhiteSmoke; color:black" | |-style="background:WhiteSmoke; color:black" | ||
|rowspan="2"|2 alignment marks | |rowspan="2"|2 alignment marks | ||
( | (three samples) | ||
|'''X''' | |'''X''' | ||
|NA | |NA | ||
| Line 123: | Line 123: | ||
|-style="background:WhiteSmoke; color:black" | |-style="background:WhiteSmoke; color:black" | ||
|rowspan="2"|4 alignment marks | |rowspan="2"|4 alignment marks | ||
(three samples) | |||
|'''X''' | |'''X''' | ||
| | | 1±2 | ||
|rowspan="2" align="center"|0 | |rowspan="2" align="center"|0.002±0.001 | ||
| 0.00±0.05 | | 0.00±0.05 | ||
| 0.05±0.05 | | 0.05±0.05 | ||
| Line 134: | Line 135: | ||
|-style="background:WhiteSmoke; color:black" | |-style="background:WhiteSmoke; color:black" | ||
|'''Y''' | |'''Y''' | ||
| | | -12±1 | ||
| -0.25±0.05 | |||
| -0.29±0.05 | |||
| 6.33±2.33 | |||
| -1.38±1.18 | |||
|} | |||
{|border="1" cellspacing="0" cellpadding="3" style="text-align:center;" | |||
|- | |||
|- | |||
|-style="background:silver; color:black" | |||
!colspan="2"|MA6-MLA | |||
!Scaling [ppm] | |||
!Shearing [mRad] | |||
!Median [µm] | |||
!Error [µm] | |||
!Run-out [ppm] | |||
!Rotation [ppm] | |||
|- | |||
|- | |||
|-style="background:WhiteSmoke; color:black" | |||
|rowspan="2"|2 alignment marks | |||
|'''X''' | |||
|NA | |||
|rowspan="2"|NA | |||
| -0.03±0.05 | |||
| 0.01±0.05 | |||
| 1.00±2.33 | |||
| 0.00±1.18 | |||
|- | |||
|-style="background:WhiteSmoke; color:black" | |||
|'''Y''' | |||
| NA | |||
| -0.05±0.05 | |||
| -0.07±0.05 | |||
| 0.42±2.33 | |||
| 0.00±1.18 | |||
|- | |||
|-style="background:WhiteSmoke; color:black" | |||
|rowspan="2"|4 alignment marks | |||
|'''X''' | |||
| 1±2 | |||
|rowspan="2" align="center"|0.002±0.001 | |||
| 0.00±0.05 | |||
| 0.05±0.05 | |||
| -0.67±2.33 | |||
| -1.67±1.18 | |||
|- | |||
|-style="background:WhiteSmoke; color:black" | |||
|'''Y''' | |||
| -12±1 | |||
| -0.25±0.05 | | -0.25±0.05 | ||
| -0.29±0.05 | | -0.29±0.05 | ||