Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 01 processing: Difference between revisions
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==Overlay== | ==Overlay== | ||
{|border="1" cellspacing="0" cellpadding="3" style="text-align:left;" | |||
|- | |||
|- | |||
|-style="background:silver; color:black" | |||
!colspan="2" align="center"| | |||
!Scaling | |||
!Median [µm] | |||
!Error [µm] | |||
!Run-out [ppm] | |||
!Rotation [ppm] | |||
|- | |||
|- | |||
|-style="background:WhiteSmoke; color:black" | |||
|rowspan="2" align="center"|No flat alignment | |||
(two samples) | |||
|'''X''' | |||
| | |||
| -0.03±0.05 | |||
| 0.01±0.05 | |||
| 1.00±2.33 | |||
| 0.00±1.18 | |||
|- | |||
|-style="background:WhiteSmoke; color:black" | |||
|'''Y''' | |||
| | |||
| -0.05±0.05 | |||
| -0.07±0.05 | |||
| 0.42±2.33 | |||
| 0.00±1.18 | |||
|- | |||
|-style="background:WhiteSmoke; color:black" | |||
|rowspan="2" align="center"|With flat alignment | |||
|'''X''' | |||
| | |||
| 0.00±0.05 | |||
| 0.05±0.05 | |||
| -0.67±2.33 | |||
| -1.67±1.18 | |||
|- | |||
|-style="background:WhiteSmoke; color:black" | |||
|'''Y''' | |||
| | |||
| -0.25±0.05 | |||
| -0.29±0.05 | |||
| 6.33±2.33 | |||
| -1.38±1.18 | |||
|} | |||