Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 01 processing: Difference between revisions
| Line 42: | Line 42: | ||
|rowspan="2" align="center"|No flat alignment | |rowspan="2" align="center"|No flat alignment | ||
(two samples) | (two samples) | ||
|X | |'''X''' | ||
| -0.03±0.05 | | -0.03±0.05 | ||
| 0.01±0.05 | | 0.01±0.05 | ||
| Line 50: | Line 50: | ||
|- | |- | ||
|-style="background:WhiteSmoke; color:black" | |-style="background:WhiteSmoke; color:black" | ||
|Y | |'''Y''' | ||
| -0.05±0.05 | | -0.05±0.05 | ||
| -0.07±0.05 | | -0.07±0.05 | ||
| Line 59: | Line 59: | ||
|-style="background:WhiteSmoke; color:black" | |-style="background:WhiteSmoke; color:black" | ||
|rowspan="2" align="center"|With flat alignment | |rowspan="2" align="center"|With flat alignment | ||
|X | |'''X''' | ||
| 0.00±0.05 | | 0.00±0.05 | ||
| 0.05±0.05 | | 0.05±0.05 | ||
| Line 67: | Line 67: | ||
|- | |- | ||
|-style="background:WhiteSmoke; color:black" | |-style="background:WhiteSmoke; color:black" | ||
|Y | |'''Y''' | ||
| -0.25±0.05 | | -0.25±0.05 | ||
| -0.29±0.05 | | -0.29±0.05 | ||