Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 01 processing: Difference between revisions
| Line 31: | Line 31: | ||
|- | |- | ||
|-style="background:silver; color:black" | |-style="background:silver; color:black" | ||
! | !colspan="2" align="center"| | ||
!Median [µm] | !Median [µm] | ||
!Error [µm] | !Error [µm] | ||
| Line 40: | Line 40: | ||
|- | |- | ||
|-style="background:WhiteSmoke; color:black" | |-style="background:WhiteSmoke; color:black" | ||
|rowspan="2" align="center"|No flat alignment | |||
(two samples) | |||
|X | |X | ||
| -0.03±0.05 | | -0.03±0.05 | ||
| Line 53: | Line 55: | ||
| 0.42±2.33 | | 0.42±2.33 | ||
| 0.00±1.18 | | 0.00±1.18 | ||
|- | |||
|-style="background:WhiteSmoke; color:black" | |||
|rowspan="2" align="center"|With flat alignment | |||
|X | |||
| 0.00±0.05 | |||
| 0.05±0.05 | |||
| -0.67±2.33 | |||
| -1.67±1.18 | |||
|- | |||
|-style="background:WhiteSmoke; color:black" | |||
|Y | |||
| -0.25±0.05 | |||
| -0.29±0.05 | |||
| 6.33±2.33 | |||
| -1.38±1.18 | |||
|} | |} | ||
==Overlay== | ==Overlay== | ||